UV-irradiation induced modification of PDMS films investigated by XPS and spectroscopic ellipsometry
نویسندگان
چکیده
UV-irradiation (172 nm) induced changes of PDMS surfaces were investigated with X-ray photoelectron spectroscopy (XPS) and spectroscopic ellipsometry (SE). Both methods indicate the modification of the PDMS to a silicalike surface (SiO2). These conclusions could be drawn from the elemental composition determined by XPS and the binding energy shifts in the XPS spectra of the Si 2p and O 1s levels. Similarly the refractive index n determined with ellipsometry reaches a value close to the one of SiO2. Additionally, ellipsometry allows to monitor the decrease of the original film thickness with increasing UV-irradiation time. 2003 Elsevier Science B.V. All rights reserved.
منابع مشابه
Neutron reflectometry and spectroscopic ellipsometry studies of cross-linked poly(dimethylsiloxane) after irradiation at 172 nm.
Poly(dimethylsiloxane) (PDMS) was irradiated under ambient conditions in air with a Xe2-excimer lamp. The formation of atomic oxygen and ozone during irradiation in air by V-UV photons results in the transformation of PDMS to silicon oxide. The irradiated surfaces were studied by spectroscopic ellipsometry and neutron reflectometry. The measurements revealed the formation of a rough, i.e., betw...
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